Parametric Design and Optimization for a Non-Linear Precision X-Y Microstage

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A new micropositioning system based on the kinematic coupling principle is shown to offer advantages with respect to resolution, accuracy, precision, and position repeatability while maintaining full two-dimensional motion control. This new system is shown to have a mechanical amplification (leverage) that can allow up to several times increase in the effective positioning resolution of the actuators driving the kinematic coupling mechanism. However, the magnitude of the leverage is not homogeneous over the entire working envelope of the mechanism. Furthermore, in some areas, the magnitude of the leverage is shown to be very sensitive to perturbations in the design parameters. This paper provides a discussion of the parameter design analysis for the proposed system using a methodology based on design of experiments and nonlinear mathematical programming. Using an indicator developed for this purpose, a response surface for the mechanical advantage is obtained and optimal design areas are identified. More importantly, this analysis proves to be flexible enough in searching for the set of parameters that would achieve any particular target on the level of performance, while presenting the least sensitivity to manufacturing noise. This allows for manufacture of variations of the proposed mechanism within feasible manufacturing tolerances and costs. A case study is also presented as an illustration of one real application in manufacturing design. Additionally, potential areas of implementation, such as precision assembly and rapid prototyping, have been identified.


Copyright 2000 Society of Manufacturing Engineers

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Publication Title

Journal of Manufacturing Systems

Published Citation

Taylor, James B., Andres L. Carrano, and Yahya Fathi. "Parametric design and optimization for a nonlinear precision X–Y microstage." Journal of manufacturing systems 19, no. 4 (2000): 229-238. doi:10.1016/S0278-6125(01)80002-9



Peer Reviewed